Ion Beam System Parts & Accessories

By: Intlvac  06-Dec-2011
Keywords: Spare Parts

With over a decade of experience, you can trust Intlvac to supply you with spare parts and accessories for a number of gridded and end-hall ion sources.

Also, as a major manufacturer of high vacuum systems, we carry our own water-feedthroughs, baseplate adaptors, Ion Gauges, Convectron Gauges, CTI Cryopumps and Compressors, thermal management products compatible with high vacuum operation.

Our parts are cleaned for high vacuum use straight out of the bag and our large inventory of parts allows us to ship the same day around the world.

Keywords: Spare Parts

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Other products and services from Intlvac


Vacuum Systems | Intlvac

Our product line ranges from small R&D/pilot project systems to large production systems utilizing processes such as Ion beam Etching, Sputtering, E-beam and Thermal Evaporation, fiber-optic coating and much more. All systems come standard with our latest control interface; Intlvac’s Lab View front end communicates with our Ethernet IP based control system.


Thin Film Coating Services | Intlvac

Intlvac has taken advantage of decades of experience designing and building thin film coating and etching tools to develop our own in-house systems for processes such as E-beam and Thermal Evaoporation, DC Magnetron Sputtering, and Plasma-Assisted Reactive Sputtering.


Services | Intlvac

Every source we rebuild receives a full operation test in our dedicated oil free high vacuum test chamber. Our personnel can repair and rebuild a source in less than a day for your convenience. We can also provide on-site installation of new and used ion sources. Our shop is always stocked with available parts for Mark II Sources. We use new parts and completelly clean and re-assemlbe each source.


Mark II Ion Source Repair

We can also help our ion source customers with various other system parts such as vacuum gauges, gaskets, quartz crystals, crystal head sensors, cryopumps, helium compressors, turbo pumps, ion sources grids, power supplies, sputter power supplies. Each repaired/rebuilt source receives a full operational test under high vacuum before it is shipped to ensure that your Mark II is ready for immediate installation and operation upon return.